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7.2.4 Current Status of Sputtering Magnetron sputtering is the most widely used sputtering method and one of the wellestablished coating techniques used for microelectronic applications such as metallization and magnetic devices. In the ... 7.2.4 Current Status of Sputtering Magnetron sputtering is the most widely used sputtering method and one of the wellestablished coating techniques used for microelectronic applications such as metallization and magnetic devices. In the last several years， many nanometer multilayer structures based on different material systems and/or microstructures have been prepared by sputtering. However， the material systems are mainly limited to conductors and nitrides. Nevertheless， nanolayer BaTiO3 (Jia， et al.， 1995a) and nanometer multilayer structures based on simple oxide materials such as Y2O3/ZeO2 superlattice (Yashar， et al.， 1999) have been prepared by sputtering.