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Use magnetron sputtering system in Si (100) substrate 1-6 sedimentary AlN film samples. Application of surface profile apparatus on its thickness， residual stress and surface roughness measurement; Application of nano creasing apparatus on its hardness and elastic modulus measured; Application of the multi-functional surfaces tester of friction coefficient measured. Through the Origin8.0 software experiment data and graphics processing， draw the thickness and residual stress and working pressure on the relationship and other physical quantities of curve graphics， and calculation of the film is the yield strength.

By magnetron sputtering system 1-6 substrate deposition of AlN thin films on Si (100)， the application of surface profiler to measure its thickness， residual stress and surface roughness; the application of nano-indenter on the hardness and elastic modulusvolume measurement; application of multifunctional surface testing machine， the friction coefficient measurements on the analysis of experimental data and graphics processing. by Origin8.0 software， come to the thickness of the relationship between residual stress and work pressure and other physical quantities of the curve graphics， andcalculate the yield strength of the film.