Followthesysteminstallationinstructionscarefullyandinthespecifiedorder.ThesoftwaremustbeinstalledonthecomputerbeforeconnectingtheUSBcable.2.1FacilitiesRequirementsFacilit... Follow the system installation instructions carefully and in the specified
order. The software must be installed on the computer before
connecting the USB cable.
2.1 Facilities Requirements
Facilities requirements for the alpha-SE system are listed in Table 2-1
and the system dimensions are given in Fig. 2-1. As shown in Fig. 2-2,
the alpha-SE tool requires a clear work area of 20 by 18 inches (500 by
460 mm), excluding the operator computer.
2.2 Unpacking the Hardware
Opening the Shipping Container
Move the alpha-SE shipping container to the area where the tool will be
installed. Open the container and remove the top and side pieces of
packing foam. Carefully remove all smaller components from the
shipping container, verifying that you received all components, as shown
in Fig. 2-3. Finally, remove the alpha-SE ellipsometer and position it on
your clear 20” by 18” (510 by 460 mm) workspace.
Caution: The alpha-SE ellipsometer without sample chuck weighs
approximately 37 lbs. (16 kg.). Please find an assistant to lift the
alpha-SE unit out of the shipping carton and on to clear work surface.