使用椭圆偏振光谱仪表征封装应用中的势垒层

The UVISEL FUV combines high-speed acquisition, high accuracy and versatility with a straightforward recipe mode for automated tasks. This powerful combination allows the UVISEL spectroscopic ellipsometer to be used for monitoring the production of barrier coatings for packaging applications in real time. 研究级经典型椭偏仪 UVISEL