使用椭圆偏振光谱仪表征铁电薄膜PbZr1-xTixO3&BA1-xSrxT

Spectroscopic ellipsometry is a powerful technique to characterize the thickness and optical constants of complex ferroelectric stacks with high accuracy and precision.
Specific model领 features in this study include the characterization of the anisotropic sapphire substrate, rough overlayer and layer inhomogeneity with depth. 研究级经典型椭偏仪 UVISEL