Capability:
- Semiconductor Surface Barrier-Vsb 表面势垒
- Oxide Total Charge -Qtot 氧化物总电荷
- Interface Trapped Charge-Qit 界面电荷
- Interface Trap Density-Dit 界面态密度
- Di Spectrum:Dit vs. Vsb
- Dielectric Capacitance -CD and thickness -CET 介电层电容和电学总厚度
- Dielectric Leakage 介电层漏电