德国SUSS LabSpin6/ LabSpin8 匀胶机

Substrates
§ LabSpin 6: up to 150mm round or 100mm square substrates

§ LabSpin 8: up to 200mm round or 150mm square substrates

Motor
§ Brushless E-motor with collection glass beaker

§ Spin speed: min 50 rpm

max 8000 rpm (with 200mm chuck)

§ Acceleration: max 3000 rpm/s

Controller
§ Graphical User Interface: Touch panel with color display

§ Number programmable recipes: max 200
§ Step number per recipe: max 40
§ Loop function: repeats a set of process step

Coater Options

§ Cover plate for additional functions

§ Resist dispense systems

É Pressurized syringe dispense

É Full automatic dispense system

§ Edge Bead Removal (EBR)

Developer Options
§ Cover plate for additional functions

§ Developer dispense option
§ DI-water dispense option
§ Nitrogen Drying option