SUSS HP8
Technical Data | |
Wafer Size | Up to 200 mm round or 6" square |
User Interface | Dedicated touch panel controller |
# of Recipes | max. 200 |
# of Steps/Recipe | max. 40 |
Step Time | 0 - 999s in 1s steps |
Optional User Interface | Via controller of SUSS RCD8 tool |
# of Recipes | >1000 |
# of Steps/Recipe | max. 50 |
Step Time | 0 - 999s in 1s steps |
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