德国SUSS匀胶机/热板/显影机

Substrates
 LabSpin 6: up to 150mm round or 100mm square substrates

 LabSpin 8: up to 200mm round or 150mm square substrates 

Motor
 Brushless E-motor with collection glass beaker 

 Spin speed: min 50 rpm 

max 8000 rpm (with 200mm chuck) 

 Acceleration: max 3000 rpm/s 

Controller
 Graphical User Interface: Touch panel with color display 

 Number programmable recipes: max 200
 Step number per recipe: max 40
 Loop function: repeats a set of process step 

Coater Options 

 Cover plate for additional functions 

 Resist dispense systems

   Pressurized syringe dispense 

   Full automatic dispense system 

 Edge Bead Removal (EBR) 

Developer Options
 Cover plate for additional functions 

 Developer dispense option
 DI-water dispense option
 Nitrogen Drying option