南京多塔电子科技有限公司
南京多塔电子科技有限公司

zeta-20三维显微轮廓仪

Technical Agreement & Configuration

技术协议及配置

一、 设备概述 Product Description

1 Name 3D Microscope

名称: 3D 显微镜

2 Type Zeta-20A

Zeta-20A.png 

型号: Zeta-20A

3 Product Features:

产品特点:

l The Zeta-20A advanced surface measurement system provides 3D imaging and metrology capabilities in a flexible, cost-effective package. Zeta Instruments’ proprietary focus map technology enables rapid, true-color imaging and quantitative analysis of surfaces for off-line product inspection. The Zeta-20A automatically gathers data on step height, feature volume, dimensions and roughness on multiple measurement sites to give you the data you need to monitor and optimize your manufacturing processes.

Zeta-20A是集三维成像和计量功能于一身的先进表面测量系统。它功能配备齐全、使用方便,是三维测量系统中性能价格比的选择。Zeta-20A能够自动聚焦采集样品上的多个点的工艺参数,如台阶高度、体积、尺寸及粗糙度等,为您提供监控及优化生产流程所需的数据。

 

l Zeta metrology systems have the unique capability to combine multiple measurement functions into a single tool. Our Solar TRIPLE PLAY configuration targets solar cell characterization by providing three key measurements in one high-value tool package.

泽塔测量系统的独到之处在于它能集多种测量功能于一身。 我们的太阳能三合一应用软件包以太阳能电池业为服务对象,提供高价值的三项关键测量功能。

 

l Texture Characterization - Our optical profiling capability permits the rapid analysis of textured surfaces. 3D visualization delivers a qualitative view of the surface, while feature size histograms, linear and areal roughness calculations provide quantitative data on base or acid etched surface textures.

绒面分析 - 我们的光学轮廓测量功能可以用来对绒面做快速分析。 三维图像可以提供绒面的定性资料。 而绒面上的几何特征(如金字塔等)尺寸的直方图, 线和面粗糙度的计算值等可用来定量描述由酸或碱腐蚀所产生的绒面特征。

 

l Finger Contact Profiling - Imaging solar finger metal contacts is difficult because of the vast difference in reflectivity between the AR-coated texture and the metal contact. The textured area can have a reflectivity of 0.5% or less while the metal reflectivity can be over 90%. Zeta solar application software includes anti-halation algorithms that compensate for the huge difference in surface brightness to generate clear 3D images of the contact on the texture while also delivering accurate step height and profile data.

金属栅线轮廓测量 – 由于金属栅线上光的反射率与镀有防反膜的绒面上光的反射率之间存在着巨大的差异,要对绒面上的金属栅线进行成像比较困难。往往绒面区域的反射率小于0.5%,而金属区域的反射率可超过90%以上。泽塔太阳能应用软件运用反光晕算法,弥补了不同区域表面亮度之间的巨大差异,从而可以清晰地对金属栅线进行三维成像,同时提供准确的台阶高度值和轮廓分布数据。

 

二、 设备配置 Configuration

Item

项目

Article No.

型号

Description

描述

1

BSE-0020-01

The Zeta-20A wafer metrology package includes the following features:

ZETA20A测量系统包含如下特点

 Max sample size: 350mm x 350mm XY stage travel: 180mm x 200mm

最大测试样品350mm x 350mm,XY轴行程为180mm x 200mm

One software license and a desktop PC with minimum specifications:

软件许可证及具有如下配置的桌面电脑
    Processor Intel  i7 CPU
    16GB RAM
    HDD 1TB
    3D Graphics Accelerator card
    2GB Video RAM minimum

 

2

PER-0126

24" LCD Color Monitor. 1960 x 1280 pixels

24寸液晶显示器,1960 x 1280像素

3

PKG-2022

Zeta 3D Imaging and Metrology Software. It includes the following metrology capabilities: roughness and step height analysis, dimensional measurement tools, multiple cross section statisticsStencil test. Data files are exportable as comma separated variable files.

Zeta3D测量成像软件包括以下测量功能:粗糙度和台阶高度分析,尺寸测量工具,多重截面统计,多点测量、主栅三维测量、网版测试。数据文件可以输出为不同格式的单独文件。

4

SFW-0020

Single Offline Software License单独的离线软件许可证

5

CCD-0013

Color CCD Camera, 2/3", 1280 X 960, 30fps

彩色CCD相机2/3" CCD传感器,1280 x 960 像素,30帧/秒

6

OBJ-0005

5X objective lens5倍物镜

7

OBJ-0050

50X objective lens50倍物镜

8

OBJ-0100

100X objective lens100倍物镜

9

OPT-1005

Automatic Objective Sensor 自动物镜传感器

10

CPL-0050

0.50X Standard Lens Coupler.0.5倍耦合镜标准镜头

11

STG-0017

AUTO  Stage, 180mmX200mm travel, 动载台 180mmX200mm行程

12

REF-0414

Step Height Reference台阶高度标样

三、 技术指标 Acceptance Specifications

l X,Y Resolution

A series or lines 0.5µm wide with 0.5µm pitch will be imaged with the 100X objective.  

XY轴分辨率

100倍物镜对0.50微米宽,相间0.50微米的一系列长方形短线进行成像。肉眼应该可分辨每条短线。

l 横向重复精度<1%

l 横向准确度< 1%

 

50倍物镜对0. 7微米宽,相间0. 7微米的一系列长方形短线进行成像。肉眼应该可分辨每条短线。

l Z accuracy

(base on a 25μm step height reference that be scanned 10 times)Average of 10 readings to be within ±2.5% of the step height value (the tested wafer from Trina or Zeta)

Z轴精度,对泽塔仪器公司25微米(目标值)台阶标样重复扫描10次,10次测量平均值应落在台阶标样高度值的±2.5%以内 

l Z轴测量精度<13nm

 

l Z repeatability

(base on a 25μm step height reference that be scanned 10 times)The standard deviation of the 10 readings divided by the average value will be less than 1.5% (the tested wafer from Trina or Zeta)

Z轴重复性,对泽塔仪器公司25微米(目标值)台阶标样重复扫描1010次测量标准偏差值除以10次测量平均值,所得结果应小于1.5%

l objectives lens:5X、50×、100x

物镜:5倍、50倍、100倍

 

l 可测最大高度:40mm

l 测试速度:<30s

 

l Computer : 16GB RAM (minimum), 500GB Hard Drive (minimum), 3D accelerator graphics card, Firewire, USB 2.0 ports,22” LCD monitor

计算机:大于16GB内存,大于500GB硬盘,3D图像显示加速卡,Firewire B,USB 2.0接口,24英寸液晶显示

 

l 软件功能:粗糙度、台阶高度 、截面,面积、比表面积、多点测量、网版测试。

l 具有防震效果

测量头寿命承诺> 50,000 hours


取点间隔: 10nm最大扫描点数: 10000扫描速度: 0.1ms/minZ轴测量范围: 130nmZ轴分辨率: 13nm
Zeta3D显微镜测量系统配备ZDotZL技术和多模式光学测量,可以检测多种白光干涉仪和共聚焦显微镜不能检测的复杂表面。Zeta Instruments 已23个国家安装了超过250系统。快速采用泽塔的产品证明了公司的差异化技术,具有10项ZL和13的过程中更多的ZL。Zeta的高速增长得益于快速的技术进步和对客户需求的专注。

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