zeta-20三维显微轮廓仪

Technical Agreement & Configuration

技术协议及配置

一、 设备概述 Product Description

1、 Name： 3D Microscope

名称： 3D 显微镜

2、 Type： Zeta-20A

型号： Zeta-20A

3、 Product Features:

产品特点：

l The Zeta-20A advanced surface measurement system provides 3D imaging and metrology capabilities in a flexible, cost-effective package. Zeta Instruments’ proprietary focus map technology enables rapid, true-color imaging and quantitative analysis of surfaces for off-line product inspection. The Zeta-20A automatically gathers data on step height, feature volume, dimensions and roughness on multiple measurement sites to give you the data you need to monitor and optimize your manufacturing processes.

Zeta-20A是集三维成像和计量功能于一身的先进表面测量系统。它功能配备齐全、使用方便，是三维测量系统中性能价格比的选择。Zeta-20A能够自动聚焦采集样品上的多个点的工艺参数，如台阶高度、体积、尺寸及粗糙度等，为您提供监控及优化生产流程所需的数据。

l Zeta metrology systems have the unique capability to combine multiple measurement functions into a single tool. Our Solar TRIPLE PLAY configuration targets solar cell characterization by providing three key measurements in one high-value tool package.

泽塔测量系统的独到之处在于它能集多种测量功能于一身。 我们的太阳能三合一应用软件包以太阳能电池业为服务对象，提供高价值的三项关键测量功能。

l Texture Characterization - Our optical profiling capability permits the rapid analysis of textured surfaces. 3D visualization delivers a qualitative view of the surface, while feature size histograms, linear and areal roughness calculations provide quantitative data on base or acid etched surface textures.

绒面分析 - 我们的光学轮廓测量功能可以用来对绒面做快速分析。 三维图像可以提供绒面的定性资料。 而绒面上的几何特征（如金字塔等）尺寸的直方图， 线和面粗糙度的计算值等可用来定量描述由酸或碱腐蚀所产生的绒面特征。

l Finger Contact Profiling - Imaging solar finger metal contacts is difficult because of the vast difference in reflectivity between the AR-coated texture and the metal contact. The textured area can have a reflectivity of 0.5% or less while the metal reflectivity can be over 90%. Zeta solar application software includes anti-halation algorithms that compensate for the huge difference in surface brightness to generate clear 3D images of the contact on the texture while also delivering accurate step height and profile data.

金属栅线轮廓测量 – 由于金属栅线上光的反射率与镀有防反膜的绒面上光的反射率之间存在着巨大的差异，要对绒面上的金属栅线进行成像比较困难。往往绒面区域的反射率小于0.5％，而金属区域的反射率可超过90％以上。泽塔太阳能应用软件运用反光晕算法，弥补了不同区域表面亮度之间的巨大差异，从而可以清晰地对金属栅线进行三维成像，同时提供准确的台阶高度值和轮廓分布数据。

二、 设备配置 Configuration

三、 技术指标 Acceptance Specifications

l X,Y Resolution

A series or lines 0.5µm wide with 0.5µm pitch will be imaged with the 100X objective.  

XY轴分辨率

用100倍物镜对0.50微米宽，相间0.50微米的一系列长方形短线进行成像。肉眼应该可分辨每条短线。

l 横向重复精度<1%

l 横向准确度< 1%

用50倍物镜对0. 7微米宽，相间0. 7微米的一系列长方形短线进行成像。肉眼应该可分辨每条短线。

l Z accuracy

(base on a 25μm step height reference that be scanned 10 times)Average of 10 readings to be within ±2.5% of the step height value (the tested wafer from Trina or Zeta)

Z轴精度，对泽塔仪器公司25微米(目标值)台阶标样重复扫描10次，10次测量平均值应落在台阶标样高度值的±2.5%以内 

l Z轴测量精度<13nm

l Z repeatability

(base on a 25μm step height reference that be scanned 10 times)The standard deviation of the 10 readings divided by the average value will be less than 1.5% (the tested wafer from Trina or Zeta)

Z轴重复性，对泽塔仪器公司25微米(目标值)台阶标样重复扫描10次，将10次测量标准偏差值除以10次测量平均值，所得结果应小于1.5%

l objectives lens：5X、50×、100x

物镜：5倍、50倍、100倍

l 可测最大高度：40mm

l 测试速度：<30s

l Computer : 16GB RAM (minimum), 500GB Hard Drive (minimum), 3D accelerator graphics card, Firewire, USB 2.0 ports，22” LCD monitor

计算机：大于16GB内存，大于500GB硬盘，3D图像显示加速卡，Firewire B，USB 2.0接口，24英寸液晶显示

l 软件功能：粗糙度、台阶高度 、截面，面积、比表面积、多点测量、网版测试。

l 具有防震效果

测量头寿命承诺> 50,000 hours