技术参数:
Description | MLT-PT90i/DIVAC 3.0 | MLT-PT90i/Ecodry 25 plus |
Turbomolecular pump | TURBOVAC 90i | TURBOVAC 90i |
Fore vacuum pump(Dry) | DIVAC3.0 | Ecodry 25 plus |
High vacuum connection | DN 63 ISO-K/CF | DN 63 ISO-K/CF |
Turbopump Operating speed | 7200rpm | 7200rpm |
Pumping speed for N2/H2 | 90I/s / 78I/s | 90I/s / 78I/s |
UItimate pressure | 63 ISO-K:<8×10-8mbar 63CF:<5×10-10mbar | 63 ISO-K:<8×10-8mbar 63CF:<5×10-10mbar |
Fore pumping speed | 3.0 m³/h | 25 m³/h |
Mains supply | 230±10% V | 230±10% V |
Number of gauges,max. | 2 | 2 |
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