上海沃埃得贸易有限公司
上海沃埃得贸易有限公司

德国Phystech RH2030霍尔效应测试仪

PHYS TECH GmbH RH2035 霍尔效应测试仪器

1.设备名称:霍尔效应测试仪
2.功能描述:测量半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数
3.技术参数:
3-1测试范围:Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N Type & P Type)等材质的半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数
3-2磁场:
3-2-1磁场强度:1T 电磁体
3-2-2磁场类型:电磁体
3-2-3磁场均匀性:磁场不均匀性<±1 %
10年内磁场变化<±0.2%
3-3温 度:
3-3-1温度区域:77K(液氮温度)或室温
3-4电阻率范围:1 Ohm*cm ~10 M Ohm*cm
3-5电阻范围:0.1 m Ohms ~10 G Ohms
3-6载流子浓度:107~1021cm-3
3-7迁移率:10-2~107 cm2/volt*sec
3-8输入电流:
3-8-1电流范围:1000 pA~10mA
3-8-2电流解析度:25 pA (lowest range)
3-8-3电流精度:2%
3-9输入电压:
3-9-1电压范围:±10V
3-9-2电压分辨率:1μV
4.仪器特点:
4-1Automatic contact check
自动接触检查(欧姆接触)
4-2Routine and enhanced software
常规和增强软件
4-3Differential resistivity measurements by I/V-curves
I/V曲线测试电阻率差异
4-4Misalignment voltage compensation
失调电压补偿
4-5Correction of slow sample drift voltage, especially for ZnO,
修正慢样品漂移电压,特别是氧化锌
4-6Automatic field calibration
自动现场标定
4-7Large concentration and resistivity range
大浓度和电阻率范围
4-8Flexible, modular hardware
灵活的模块化硬件
4-9Support of various magnets, for example BioRad HL 5200
支持多样磁场
4-10Support of various temperature controllers
支持各种温度控制器(支持客户自行升级变温系统)
5硬件
5-1The standard system consists of a bench top electronic system, a small magnet and a sample stage for room temperature and LN2 measurements.
标准系统包含电子测试系统、磁场和两个温度区域的测试平台(室温和液氮温度)
5-2The electronics include the current source, the voltage measurement part, the contact switching module and the IEEE or RS232 interface. It is completely micro processor controlled.
电子测试系统包括由单片机控制的电流源、电压测试、接触开关模块、IEEE或RS232接口
5-3The contact switching module is designed to allow all possible measurement configurations.
接触开关模块支持所有用户用于其他的配置(用户可以采用制冷机做变温霍尔测试)
5-4The current source has adjustable limits for voltage and/or power. {+++}
电流源具有可调电压和/或电源的限制
5-5Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications.
电压测量提供了不同的输入放大器或低电流或低电压应用的优化。



11德国Phystech RH2030霍尔效应测试仪产品样册

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