TESCAN LYRA3 FIB-SEM with integrated TOF-SIMS analyser

文档简介The unique combination of an FIB-SEM system from TESCAN and a Time-of-Flight (TOF) Secondary Ion Mass Spectrometer (SIMS) from TOFWERK represents a novel and cost-effective solution for material analysis. The user of the system is provided with information on the material composition (including light elements) and distribution of individual elements in the analysed volume.