文档简介The MEMSMap 510 illuminates the target area with an xpanded laser beam, while the object is imaged by a microscopic objective onto a CMOS sensor array. For out-of-plane easurements, an internal reference beam is used to interfere with the object light. For in-plane-measurements, two laser beams are used for object illumination.For vibration measurements the system computer uses a signal generator to drive an excitation device, and the target object is excited over a frequency range. Vibration a
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