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MCL 提示/倾斜、旋转纳米位移台Align6系列

北京欧兰科技发展有限公司

企业性质

入驻年限第4年

营业执照
同类产品


Features

  • Low profile

  • Six axis motion (XYZ θXθYθZ)

  • 100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion

  • 200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion

  • Center aperture: 35mm diameter

  • Closed loop control



Typical Applications

  • Alignment

  • MEMS

  • Nanolithography

  • Metrology


six axis piezo stage with xyz tip tilt and in-plane rotation and manual micrometer stage

Product Description

The Nano-Align6 is a six axis (X, Y, Z, θX, θY, θZ) nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQtechnology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.



Technical Specifications

Ranges of motion (Nano-Align6-100)100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ)
Ranges of motion (Nano-Align6-200)200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ)
Resolution (Nano-Align6-100)0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ)
Resolution (Nano-Align6-200)
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ)
Resonant Frequencies
X axis (Nano-Align6-100/Nano-Align6-200)450/400 Hz ±20%
Y axis (Nano-Align6-100/Nano-Align6-200)350/300 Hz ±20%
Z axis (Nano-Align6-100/Nano-Align6-200)450/350 Hz ±20%
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAluminum, Titanium or Invar
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-Align6 Series Drawing
six axis piezo stage drawing
Nano-Align6 Series Catalog Pages
catalog page for six axis nanopositioning system



Related Products

  • Nano-Align3 Series

  • Nano-Align5 Series

  • Nano-Man5

  • Nano-M3Z

  • Nano-Theta/H

  • Accessories

  • Nano-Drive