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非接触式掩膜对准机

孚光精仪(香港)有限公司

企业性质

入驻年限第8年

营业执照
同类产品激光光刻机(3件)

这款非接触式掩膜对准机mask aligner 能够适合6英寸,8英寸,12英寸晶圆掩膜对准,是欧洲进口的高精度紫外曝光机.

非接触式掩膜对准机mask aligner全面满足科学研究,工艺级生产等多领域的应用。完全采用非接触式100%标定系统,对晶圆和掩膜没有伤害,大大提高间隙精度
非接触式掩膜对准机mask aligner适合各种电子元器件,包括半导体,LED,LD,MEMS,传感器等。

Alignment Scope
Objectives separation 15 ~ 75mm
Total magnification 100X
Illuminator for observation Red LED (l=633 nm)
X, Y Movement range of stage ±5 mm
Adjustment ±5°
Utility
Power source for main body and mercury lamp AC 100V 50/60Hz 15A
Vacuum source Below 21.3 Kpa (-80 Kpa from atmospheric pressure)
Exposure Unit
Lens Integrator lens
Mercury lamp 250W ultra-high pressure vapor mercury lamp
Effective exposure area Max 100 mm
Intensity distribution ±5% or less
Intensity of illumination 20 mW/cm2 (405 nm)
Exposure time control Digital timer and rotary solenoid
Mercury Lamp Lighting Unit AC 110V