二手 蔡司 AURIGA 60 聚焦离子束显微镜 FIB- SEM

• Operation Voltage:

• High Tension SEM: 200 V - 30 kV

• High Tension FIB: 0.2 kV - 30 kV       

• Source

• FEG (Schottky)

• Gallium Liquid Metal Ion Source

• Imageing Detectors:

• In-lens SE, SESI,  EsB, 4QBSD

• STEM detector

• Spectroscopy

• EDAX EDX detector

• Diffraction

• EDAX EBSD detector

• Gas Injection System (GIS)

• C, Pt, and Si

• XeF2 for selective etch enhancing

• Gas injection for charge compensation

• Manipulators

• Omniprobe 400 with independent x,y, z motion and rotation

• Transfer System

• High-vacuum transfer system compatible with glove box and UHV deposition system

Resolution

Imaging, Analysis and Sample Preparation Techniques       

• SE & BSE SEM analysis

• STEM imaging

• EDX analysis

• EBSD analysis

• 3D Slice & View tomography

• TEM sample preparation

• Nanoscale deposition and contacting