TMC STACIS ® 4 主动隔振支腿

产品概述

STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The all new STACIS 4 builds upon the success of our proven STACIS technology, which is used by 9 of the top 10 semiconductor manufacturers worldwide.

Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to applications such as, failure analysis, nanotechnology research, nanofabrication, structural biology, and materials research.

STACIS 4 includes a new and improved, lower noise, digital controller, the DC-2020 with a dual-core processor . This new advanced control system provides the user with an easy to use Graphical User Interface (GUI).

STACIS 4 builds on the advanced architecture of previous generations by adding advanced control algorithms and new patented technology. The results are previously unachievable vibration cancellation of building floor vibration at all frequencies, but particularly below 10Hz, where high resolution imaging and metrology is most sensitive. When combined with patented FloorSense™ technology, STACIS 4 reduces building floor vibration by 60 dB at 2 Hz and 27dB at 1Hz. Full performance specifications for STACIS 4 are included below.

产品优势

Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

The unique serial design and proprietary high-force piezoelectric technology 

results in a wide active bandwidth from 0.2 Hz to 150 Hz and unmatched active isolation with up to 99.9% vibration reduction at 2Hz

Even greater vibration control than STACIS III

STACIS 4 improves vibration control at 2 Hz by up to 60 dB over the industry standard solution.

Robust serial design allows you to set it and forget it, unlike competitive parallel designs that are inherently unstable and need frequent tuning to maintain peak performance. In addition STACIS 4 allows for two stage vibration control designs incorporating passive or active parallel platforms on top of the STACIS system. Two stage designs are becoming more common as instruments are forced to finer resolutions. 

STACIS 4 performance is the equivalent of reducing your vibration environment by up to 5 VC curves on a stable floor. In addition this performance gives users the flexibility to install instruments in less than ideal vibration environments, allowing more flexibility in facility layout and design.

4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)  Vertical and Horizonal axes

产品规格

Performance Specifications

Isolator Design, Dimensions, and Environmental and Utility Requirements

DC-2020 Controller Specifications

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