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线性硅纳米印章(纳米图案硅片)

筱晓(上海)光子技术有限公司

企业性质生产商

入驻年限第3年

营业执照已审核
同类产品光色散器件(光栅等)(305件)

总览

LightSmyth提供了大量的纳米加工单晶硅衬底,为工业和学术机构提供了一个低成本的纳米光子学研究入口。基底可用于光学、光子学、生物学、化学、物理学(如中子散射)、聚合物研究、纳米印迹、微流体学等领域。如果需要,基板可以涂上金属或介质涂层。大多数地表特征具有略微梯形的横截面轮廓,具有直线平行的台地和沟渠。晶格状结构也可用。提供了许多特征尺寸和沟槽深度。基板的扫描电镜图像可以在装运前拍摄,以验证准确的轮廓。

产品特点

Nanopatterned Silicon Stamps


II-VI offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.


Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, we may provide an SEM of the specific piece of nanostamp you order as an optional service


通用参数

24B3 SEM.jpg

(LightSmyth Nanopatterned Silicon Stamps 纳米图案硅片)


描述

数据

基材宽度高度误差

标准公差±0.2 mm

净孔径(CA)

距基板边缘0.5 mm(图案可延伸至基板边缘)

基底厚度

0.675 ± 0.050 mm

CA的表面质量

P/N以“p”结尾:划痕/挖:ZD划痕宽度,ZDZD直径。可提供高达20/10的规格

CA的表面质量

P/N以“-S”结尾:由于表面质量而打折的等级。至少有80%的可用面积。可能出现80/100划痕/挖痕/颗粒和不规则基底形状

CA外表面质量

无要求

Material材料

单晶硅,反应离子刻蚀


2D Nanostamps


Part Number

周期

Period(nm)

晶体类型

Lattice Type

槽深

Groove Depth(nm)

特征宽度

Feature Width(nm)

Size(mm)

S2D-18B2-0808-350-P

600

Rect Post

350

275

8.0 x 8.3

S2D-18B3-0808-350-P

700

Rect Post

350

350

8.0 x 8.3

S2D-18C2-0808-350-P

600

Hex Post

350

240

8.0 x 8.3

S2D-18C3-0808-150-P

700

Hex Post

150

290

8.0 x 8.3

S2D-18C3-0808-350-P

700

Hex Post

350

290

8.0 x 8.3

S2D-18D3-0808-350-P

700

Hex Hole

350

200

8.0 x 8.3

S2D-24B2-0808-150-P

600

Rect Post

150

195

8.0 x 8.3

S2D-24B2-0808-350-P

600

Rect Post

350

195

8.0 x 8.3

S2D-24B3-0808-150-P

700

Rect Post

150

260

8.0 x 8.3

S2D-24B3-0808-350-P

700

Rect Post

350

260

8.0 x 8.3

S2D-24C2-0808-150-P

600

Hex Post

150

165

8.0 x 8.3

S2D-24C2-0808-350-P

600

Hex Post

350

165

8.0 x 8.3

S2D-24C3-0808-150-P

700

Hex Post

150

220

8.0 x 8.3

S2D-24D2-0808-150-P

600

Hex Hole

150

180

8.0 x 8.3

S2D-24D2-0808-350-P

600

Hex Hole

350

180

8.0 x 8.3

S2D-24D3-0808-150-P

700

Hex Hole

150

290

8.0 x 8.3

S2D-24D3-0808-350-P

700

Hex Hole

350

290

8.0 x 8.3









Linear Nanostamps (line+space)

型号

周期间隔(nm)

槽深 (nm)

占空比

线宽 (nm)

尺寸
(mm)

SEM link1

Top down

SNS-C72-1212-50-P

139

50

50%

69.5

12.5×12.5×0.7

X-sec

Top down

SNS-C72-2525-50-P

139

50

50%

69.5

25×25×0.7 5

X-sec

Top down

SNS-C36-1212-110-P

278

110

50%

139

12.5×12.5×0.7

X-sec

Top down

SNS-C24-1212-110-P

416.6

110

50%

208

12.5×12.5×0.7

X-sec

Top down

SNS-C20-0808-150-D45-P

500

150

44%

220

8×8.3×0.7


Top down

SNS-C20-0808-350-D45-P

500

350

44%

220

8×8.3×0.7


Top down

SNS-C20-0808-150-D60-P

500

150

60%

300

8×8.3×0.7


Top down

SNS-C20-0808-350-D60-P

500

350

60%

300

8×8.3×0.7


Top down

SNS-C18-2009-110-D50-P

555.5

110

50%

278

20×9×0.7

X-sec

Top down

SNS-C18-2009-140-D50-P

555.5

140

50%

278

20×9×0.7

X-sec

Top down

SNS-C18-2009-110-D29-P

555.5

110

29%

158

20×9×0.7

X-sec

Top down

SNS-C18-2009-140-D29-P

555.5

140

29%

158

20×9×0.7

X-sec

Top down

SNS-C16.7-0808-150-D45-P

600

150

43%

260

8×8.3×0.7


Top down

SNS-C16.7-0808-350-D45-P

600

350

43%

260

8×8.3×0.7


Top down

SNS-C16.7-0808-150-D55-P

600

150

55%

330

8×8.3×0.7


Top down

SNS-C16.7-0808-350-D55-P

600

350

55%

330

8×8.3×0.7


Top down

SNS-C16.5-2912-190-P

606

190

50%

303

29×12×0.7

X-sec

Top down

SNS-C16.5-2912-190-S 4

606

190

50%

303

29×12×0.7

X-sec

Top down

SNS-C16.5-2924-190-P

606

190

50%

303

29×24.2×0.7 5

X-sec

Top down

SNS-C14.8-2410-170-P

675

170

32%

218

24×10×0.7



SNS-C14.8-2430-170-P

675

170

32%

218

24×30.4×0.7 5



SNS-C14.3-0808-150-D45-P

700

150

47%

330

8×8.3×0.7


Top down

SNS-C14.3-0808-350-D45-P

700

350

47%

330

8×8.3×0.7


Top down

SNS-C14.3-0808-150-D55-P

700

150

55%

375

8×8.3×0.7


Top down

SNS-C14.3-0808-150-D55-P

700

150

55%

375

8×8.3×0.7


Top down

SNS-C12-1212-200-P

833.3

200

50%

416

12.5×12.5×0.7

X-sec

Top down

SNS-C12-2525-200-P

833.3

200

50%

416

25×25×0.7 5

X-sec

Top down

SNS-C11.7-1212-200-P

855

200

50%

428

12.5×12.5×0.7



SNS-C11.7-2525-200-P

855

200

50%

428

25×25×0.7 5




2D nanostamps (rectangular and hexagonal lattice)

型号

周期间隔(nm)

晶体类型

槽深 (nm)

线宽 (nm)

尺寸

型号

S2D-24B3-0808-150-P

700

rect post

150

260

8×8.3×0.7

Top down

S2D-24B3-0808-350-P

700

rect post

350

260

8×8.3×0.7

Top down

S2D-18B3-0808-150-P

700

rect post

150

350

8×8.3×0.7

Top down

S2D-18B3-0808-350-P

700

rect post

350

350

8×8.3×0.7

Top down

S2D-24C2-0808-150-P

600

hex post

150

165

8×8.3×0.7

Top down

S2D-24C2-0808-350-P

600

hex post

350

165

8×8.3×0.7

Top down

S2D-18C2-0808-150-P

600

hex post

150

240

8×8.3×0.7

Top down

S2D-18C2-0808-350-P

600

hex post

350

240

8×8.3×0.7

Top down

S2D-24C3-0808-150-P

700

hex post

150

220

8×8.3×0.7

Top down

S2D-24C3-0808-350-P

700

hex post

350

220

8×8.3×0.7

Top down

S2D-18C3-0808-150-P

700

hex post

150

290

8×8.3×0.7

Top down

S2D-18C3-0808-350-P

700

hex post

350

290

8×8.3×0.7

Top down

S2D-24D2-0808-150-P

600

hex hole

150

180

8×8.3×0.7

Top down

S2D-24D2-0808-350-P

600

hex hole

350

180

8×8.3×0.7

Top down

S2D-18D3-0808-150-P

700

hex hole

150

200

8×8.3×0.7

Top down

S2D-18D3-0808-350-P

700

hex hole

350

200

8×8.3×0.7

Top down

S2D-24D3-0808-150-P

700

hex hole

150

290

8×8.3×0.7

Top down

S2D-24D3-0808-350-P

700

hex hole

350

290

8×8.3×0.7

Top down

New nanostamps are added to our stock frequently. Please contact our application scientists if you cannot find a nanostructure you need in our stock list.


如何清洁光栅

为了去除油脂和其他污染物,传输光栅可在室温Liquinox溶液中浸泡不超过5分钟,在三个蒸馏水中漂洗,并使用无油喷嘴用干净干燥的压缩氮气吹干,同时用镊子夹住格栅(不要使用罐上的灰尘,因为其排放物受到高度污染)。切勿让水在格栅表面干燥,应将其吹走。氮气应该来自油箱或无油压缩机

http://www.alconox.com/Resources/TechnicalBulletin.aspx?plid=3

为了在这个过程中固定光栅,可以使用Nalgene™聚丙烯剪刀式镊子。

http://www.thermoscientific.com/en/product/nalgene-polypropylene-scissor-type-forceps.html


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