全文请访问：
http://www.spm.com.cn/papers/p28.pdf
Surface roughness and its correlation with the polarity of internal hexagonal inclusions and cubic twics have been investigated by atomic force microscopy(AFM),scanning electron microscopy(SEM),transmission electron microscopy(TEM)and X-ray diffraction(XRD).The surface roughness resulted from large amount of strips,which prolonged in[110]direction with small size in[110]or[110]direction.The sidestep of each strip is just the top of high desity of hexagonal inclusions or cubic microtwins.Moreover,XRD shows that the amount of hexagonal inclusions and cubic microtwins measured in [110]direction are twice or more as much as in[110]direction.Therefore,it is hexagonal inculsions,cubic twins and their distributive polarity that is responsible to the surface characreristics of cubic GaN epiayers.
全文请访问：
http://www.spm.com.cn/papers/p28.pdf 扫描探针显微镜(SPM/AFM/STM)
长按识别二维码查看信息详情