使用配备外部气体控制模块的 Agilent 4200 MP-AES 测定

Isopropyl alcoho
l (IPA) is one of the most commonly used organic solvents
in the semiconductor industry. Silicon wafers are dried after surface
cleaning in the manufacturing process and IPA is frequently used during the
drying step. The purity of IPA used is critical since these materials come in
direct contact with the silicon wafers and any contaminants present at this
stage could be detrimental to the overall performance of the final product.
Plasma
-
based instrument
ation is widely used in the semiconductor industry
due to its multielement capability and sensitivity compared to techniques
such as Flame Atomic Absorption Spectroscopy (FAAS). However a robust
plasma is required for the analysis of organic matrices. M
icrowave Plasma
Atomic Emission Spectroscopy (MP
-
AES) uses magnetically
-
coupled
microwave energy to generate a stable plasma that is highly suited to
the analysis of organic solvents. The Agilent 4200 MP
-
AES features an
advanced microwave cavity and a
torch designed to handle a wide range
of samples, with better detection limits and an increased working range,
compared to FAAS. Major elements (Ca, K, Na and Mg) in IPA can be easily
determined using MP
-
AES with little sample preparation. Agilent 4200 微波等离子体原子发射光谱仪